Kitec Microelectronic Technologie

Non-Destructive, Non-Contact Resistivity Measurement

• Series of systems to measure wafers from 2" up to 300mm
• Manual and automatic systems including scanning and mapping capability
• Automatic wafer handling and sorting
• Wafer thickness measurement
• Automatic wafer thickness resisivity correction
• Wafer conductivity type monitor (option)

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M-Res 2000 Non-Destructive, Non-Contact Resistivity Measurement