ORS – Optical Reference Systems

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ORS represents unparalleled knowledge and expertise at the forefront of today’s cutting-edge technology. Their unique, bespoke hardware and software packages provide innovative thin-film monitoring solutions for production and R&D.

ORS' mission is to provide the No. 1 instrument of choice to all engineers who seek accurate, stable and flexible systems when it comes to monitoring thin-film deposition.

Monitoring thin-film development

There are many applications where it is necessary to deposit or grow thin films:

• Semiconductor – LPCVD, PECVD, ALD
• Optoelectronics – MOCVD, MBE, HVPE, PECVD
• MEMS – as for a semiconductor
• Nanotech – CVD for CNTS
• Vacuum coating – PECVD, PVD
• Solar – PECVD

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ORS Overview

ORS Technology

EpiEYE Professional for wafer bow measurement